NANOMAGIQC

Instituto de Microelectrónica de Madrid (CSIC-IMM)

The Instituto de Microelectrónica de Madrid (IMM) is part of the Centro Nacional de Microelectrónica (CNM), a national facility within the Consejo Superior de Investigaciones Científicas (CSIC), with a double role as a basic research institute and a technology center supporting industry. Consequently, its activity covers bothscientific and technology oriented projects.

Scientific oriented projects

The main lines are the following:

• Fabrication and physics of nanostructures and low dimensional systems, based on a long experience in MBE (Molecular Beam Epitaxy) epitaxial growth of III-V semiconductors.In particular, self-organized growth and characterization of quantum dots and wires in the InGaAs/GaAs and InAs/InP systems have been subject of various recent developments.
• Characterization of the interface between semiconductors and organic media or biomolecules for biosensors, using AFM-STM (Atomic Force Microscopy-Scanning Tunneling Microscopy).In this context, nanofabrication techniques based on local surface modification, via the AFM tip for silicon and metals, have been successfully implemented in combination with e-beam lithography, in order to obtain oxide structures and metallic bridges and contacts in the 10nm range.
• Magnetic epitaxial nanostructures are fabricated by UHV sputtering, Pulsed Laser Deposition and e-beam lithography on MBE preprocessed GaAs sustrates andspin polarization effects are studied, including Giant Magnetoresistanceand magneto-optics.

Technology oriented projects

Such projects refer to the development of devices and microsystems:

• laser diodes,
• IR detectors,
• optical modulators and integrated sensors,
• magnetic devices,
• gas sensors,
• biosensors, and
• non-invasive instrumentation for clinical diagnosis.

This type of activity, that implies the continuous updating of fabrication technology such as

• lithography,
• RIBE,
• PCVD,
• epitaxy,
• metallization, and
• sputtering,

has been carried out mainly within the CE and industrial collaborations frame, through the participation at various

• ESPRIT projects (OLIVES, NANSDEV, BLES, 3MGAS, LASMED),
• BIOTECHNOLOGY (BICEPS), and
• EU networks such as PHANTOMS, GOODS, QUANTECS and NEXUS.

Prof. Fernando Briones

Ph.D. in Physics (Universidad Complutense de Madrid, 1972).

He is active in the field of Solid State Physics and Technology with emphasis onMBE growth and optical properties of compound semiconductors and devicessuch as

• IR photodetectors,
• laser diodes,
• modulators,
• microfabricated optical sensors and microsystems, and
• magnetic and magneto-optical thin film materials and nanostructures.

He has published more than 120 papers in international journals and obtained 10 patents.

His experience as project leader includes

• obtaining and carrying out 11 national research programs,
• developing 4 EC ESPRIT projects (OLIVES, NANSDEV, BLES, 3MGAS), and
• participating in many other international cooperation projects and networks such as EC PHANTOMS, QUANTECS, GOODS and recently a NATO programme.

Dr. José Vicente Anguita

Ph.D. in Telecommunication Engineering (Universidad Politécnica de Madrid, 1982).

He is active in the field of Micro/Nano-electronics Process Engineering. From 1986 he has been a research staff member at the CSIC.

He has co-authored more than 35 publications, contributed to over 15 communications to international conferences, collaborated in 7/14 international/national research projects and obtained 2 patents.

His expertise covers a wide range of Electrical Micro/Nano-Devices Fabricationsuch as

• electron beam lithography,
• photolithography,
• plasma and wet etching,
• deposited films,
• diffusion,
• ion implantation,
• simulation (processes, devices and IC), and
• electrical characterization.